ISO 14644-1 Cleanroom Standards

ISO 14644-1 Cleanroom Standards

Class Maximum Particles/m3 FED STD 209E Equivalent
>0.1 um >0.2 um >0.3 um >0.5 um >1 um >2 um
ISO 1 10 2
ISO 2 100 24 10 4
ISO 3 1,000 237 102 35 8 Class 1
ISO 4 10,000 2,370 1,020 352 83 Class 10
ISO 5 100,000 23,700 10,200 3,520 832 293 Class 100
ISO 6 1,000,000 237,000 102,000 35,200 8,320 2,930 Class 1,000
ISO 7 352,000 83,200 29,300 Class 10,000
ISO 8 3,520,000 832,000 293,000 Class 100,000
ISO 9 35,200,000 8,320,000 2,930,000 Room Air