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ISO 14644-1 Cleanroom Standards

Posted on January 1, 2023May 24, 2023 by Berkshire Corporation

ISO 14644-1 Cleanroom Standards

Class	Maximum Particles/m³						FED STD 209E Equivalent
Class	>0.1 um	>0.2 um	>0.3 um	>0.5 um	>1 um	>2 um	FED STD 209E Equivalent
ISO 1	10	2
ISO 2	100	24	10	4
ISO 3	1,000	237	102	35	8		Class 1
ISO 4	10,000	2,370	1,020	352	83		Class 10
ISO 5	100,000	23,700	10,200	3,520	832	293	Class 100
ISO 6	1,000,000	237,000	102,000	35,200	8,320	2,930	Class 1,000
ISO 7				352,000	83,200	29,300	Class 10,000
ISO 8				3,520,000	832,000	293,000	Class 100,000
ISO 9				35,200,000	8,320,000	2,930,000	Room Air